The
following cleanroom standard is now effective:
Cleanrooms
and associated controlled environments – Part 15: Assessment of suitability for
use of equipment and materials by airborne chemical concentration (ISO 14644- 15:2017)
The
scope of the standard is:
“This
document provides requirements and guidelines for assessing the chemical
airborne cleanliness of equipment and materials which are foreseen to be used
in cleanrooms and associated controlled environments which are linked to the
ISO standard for cleanliness classes by chemical concentration (see ISO
14644-8).”
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