A new part of the ISO 14644 series of cleanroom standards has been drafted. This is “Cleanrooms and associated controlled environments — Part 14: Assessment of suitability for use of equipment by airborne particle concentration.”
The
draft is concerned with the cleanroom classification of air cleanliness by
particle concentration to the suitability of equipment (e. g. machinery, measuring
equipment, process equipment, components, tools and so forth) for use in
cleanrooms and associated controlled environments.
Proposed
tests include:
- Airborne particle concentration measurement: The aim is to confirm that the test environment is at least one ISO-ACP class cleaner than the cleanroom or clean zone within which the equipment is intended to be used.
- Airflow velocity measurement. Guidance range for vertical velocity should be in the range of 0,3 m/s to 0,5 m/s.
- Temperature, Guidance range should be 18 °C to 25 °C
- Humidity, Guidance range should be 30 % RH to 70 % RH
Additional
informative pre-tests may include:
- Airflow direction test and visualisation
- Electrostatic and ion generator test
- Particle deposition test
Posted by Tim Sandle
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