Part 13 of the revised international cleanroom standard is available for public comment. The details are:
‘Surface’ refers to the interface between two phases. For the purpose of this document, the surface is a solid.
“Clean surface” is where one or more of the contamination categories (particles, chemical) are under control
due to cleaning / decontamination. The degree of cleanliness is specified in the corresponding surface
cleanliness classifications (ISO 14644-9:2012 Surface cleanliness by particle concentration SCP; ISO 14644-
10:2013 Surface cleanliness by chemical concentration SCC). Different cleaning methods are necessary
depending on the degree of cleanliness (cleanliness class) required. This standard gives guidance on the
selection of cleaning methods to achieve specified cleanliness levels. For the selection procedure, the aspects
of surface description, cleanliness specifications, types of contamination, cleaning techniques, material
compatibility, and assessment methodology are taken into consideration. Most of the methods are suitable for
removal of more than one contamination category at the same time therefore a common standard for the
selection of a cleaning method for both particles as well as chemical contamination is needed.
Guidance
is provided on the assessment of cleaning methods for achieving the required
surface cleanliness levels specified in ISO 14644-9: Classification of surface
cleanliness by particle concentration and ISO 14644-10: Classification of
surface cleanliness by chemical concentration. Different cleaning methods may
be necessary depending on the degree of cleanliness required. The selection
procedure considers aspects such as surface description, cleanliness
specifications, types of contamination, cleaning techniques, and material
compatibility. Guidance is provided on assessing cleaning efficacy.
The reference is:
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